"Scanning Probe Microscope Drift Measurement Method (ISO11039:2012)" International Standard Officially Released

Recently, the International Standard for Scanning Probe Microscope Drift Measurement (ISO11039:2012) has been formally released by the International Organization for Standardization.

The standard was presided by Professor Huang Wenhao from the School of Engineering Science, University of Science and Technology of China, and was mainly formulated to address the problems of restricting the further application of scanning probe microscopy in nanometer measurement and nanometer processing. When scanning probe microscopy is used in nanometer measurement and nanometer processing, it often encounters slow scanning speed, drift phenomenon and other constraints.

Prof. Wenhao Huang proposed a solution to this problem. In 2006, he proposed the "Standard Measurement Method for Scanning Probe Microscope Drift Rate" to ISO/TC201. Since the proposal was formally established in 2007, after several years of efforts, the standard was successfully passed in 2011 and was officially released in recent days.

The standard measures the instrument's use by measuring the nanometer/second drift size and direction of the scanning probe microscope. The standard defines the drift rate terminology, as well as the measurement method and measurement procedure for the SPM drift rate, and regulates the instrument functions. This standard provides specifications for scanning probe microscope manufacturers. At the same time, it also makes the application of scanning probe microscope in the nano-scale measurement breakthrough bottleneck, a broader and deeper scope, and promote the development of nanometer measurement technology.