Thermal Analog Gas Mass Flow Controller and Mass Flow Meter for Semiconductors

Product Description

 Mass Flow Meter (MFM) accurately measures mass flow rates, Mass Flow Controller (MFC) accurately measures and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes. They are widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc. The typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation; vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.

Mass flow controller (MFC) and mass flow meter (MFM) belong to an industrial automation instrument. MD-05 Series MFC/MFM are analog range. MD-05 series MFM & MFC bring the high accuracy, excellent repeatability, quick response, soft-start, better reliability, wide variety ranges of operation pressure (good operation in high pressure and vacuum situations), simple convenient operation, flexible installation, possible connecting with PC to carry out automatic control to the users' system.

Application

MD-05 calorimetric mass flow meter, mass flow controller can be applied to the measurement and control of various gases, in addition to measurement can also accurately control the mass flow of gas, mass flow meter (MFM) can accurately measure the mass flow of gas.

Widely used in electronic processing equipment, semiconductors, vacuum coating, solar energy, optoelectronics, petrochemicals, metallurgy, medical and pharmaceutical, aviation power, optical fiber melting, analysis and measurement equipment, gas distribution and other industries.

Features

1, large flow type;

2, rubber seal;

3, international standard mechanical connector.

Technical Parameters

Notes :

MFC/MFM is calibrated by N2 as a standard gas.

Units:                            SCCM  (Standard Cubic Centimeter/Min);

                                     SLM    (Standard Liter/Min)

Standard Situation:      Tem - 273.15K ( 0 ºC );

Air Pressure -               101325 Pa  (760mm Hg)

F.S :                              Full Scale

 

Structure

 The MFM consists of flow sensor, flow-splitter bypass and flow amplifying circuit. If add Control valves and PID control circuit to MFM will compose a MFC. 

Operation Principle

According to the Capillary Heat Transfer Temperature Difference Calorimetry Theory, the flow sensor measures the mass flow without pressure compensation. The sensor heated the flow signal which was measured by electric bridge and amplified it through amplifier, the amplified flow testing voltage is compared with presetting voltage, the differential signal will control valve after amplified, then the flow rate of closed loop control will be as same as presetting flow rate. The bypass divider controls the flow rate. 

The outputting flow testing signal from MFC is a direct ratio with the flow through the channels, flow outputting signal is 4~20mA (or 1~5VDC). The Flow control ranges of MFC is (2~100)% F.S.. When the set point <2% F.S. the valve will shut off. MFC and MFM flow resolving power is 0.1% F.S..

If you need more further details about our products,  please feel free to contact us .

 

 

 

 

 

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